RFQ - Profilometer for sputter crater depth measurement

NPL requires a stylus profilometer to measure the sputter crater depth for X-ray Photoelectron spectroscopy and secondary ion mass spectrometry metrology work. Sputter craters are typically in the range of (1000 µm x 1000 µm) to (100 µm x 100 µm) and with depths from 10 µm to 100 nm. The sample often has high reflectivity (e.g. silver thin film or silicon wafer) and so a stylus profilometer rather than an optical profilometer is required. Detailed specifications are provided in section 2.2 and 2.3. In addition to these, high quality profiles will be deemed to have the least spurious spikes or ripples. The capability for automation and a 3D scan is preferred.