Provision of a 200mm Spectroscopic Ellipsometer

UNIVERSITY OF SOUTHAMPTONcontractContracts FinderRef 2023UoS-0684SME suitablecomplete

Estimated value

£259k

Awarded value

£259k

Awarded 01 Oct 2023

Suppliers

1

Lots

1

1 awarded

Published

04 Oct 2023

Deadline 15 Aug 2023

Description

The SNC (Southampton nanofabrication Centre) wants to purchase a Spectroscopic Ellipsometer capable of handling 200mm wafers. Spectroscopic Ellipsometery is an essential characterisation technique for the facility and is used daily to rapidly qualify the majority of all lithographic, deposition and etch processing. Throughput, measurement speed, and sample flexibility are important factors to this procurement.

Scope

Reference
2023UoS-0684
Total value
£258,830 excluding VAT
Commercial tool
Standalone contract
Contract dates
01 Oct 2023 to 31 May 2026
CPV classifications
38300000
Particular suitability
Small and medium-sized enterprises (SME)

Submission & procedure

Submission deadline
15 Aug 2023, 11:00 am

Award details

Awarded supplier(s), contract period and value as published in the award notice.

Awarded value

£259k

Award date

01 Oct 2023

Contract start

01 Oct 2023

Contract end

31 May 2026