2741 Ion Miller - University of Leeds

The School of Electronic and Electrical Engineering at the University of Leeds is seeking tenders for a ion-beam miller / etcher, specifically aimed at etching GMR and other magnetic stacks, alongside III-V semiconductor and quartz etching capabilities, on a wafer size of 100 mm diameter, and on part-pieces mounted on a 100-mm carrier. The etcher must: be compatible with reactive gases including Cl2, O2 and CF4; have a sample load lock; and have He-backside cooling capabilities (including MFC control). The system will be used for research and should offer flexibility of use.