202122/547 Supply of up to four dry etch and deposition systems
Estimated value
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goods
Awarded value
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Suppliers
1
Lots
1
1 awarded
Published
24 Aug 2023
Description
NOTICE OF AWARD OF four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher (D-RIE) •An Inductively Coupled Plasma-RIE (ICP-RIE) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)
Scope
- Reference
- ocds-h6vhtk-031776
- Commercial tool
- Standalone contract
- Contract dates
- 30 Jul 2022 to 31 Jul 2023
- Main category
- goods
- CPV classifications
- 22520000
- Contract locations
- Yorkshire and the Humber
Award criteria
Criteria the buyer will use to evaluate bids.
| Name | Description | Type | Weighting |
|---|---|---|---|
| — | — | price | — |
Submission & procedure
- Procedure
- Competitive procedure with negotiation
Award details
Awarded supplier(s), contract period and value as published in the award notice.
Awarded value
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Award date
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Contract start
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Contract end
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Awarded to
Awarded suppliers· 1 supplier
Awarded —
Award value
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Other contracts from University of Leeds
Full notice and award history for this contracting authority is on the buyer profile.
Other contracts awarded to Oxford Instruments· 10
Cross-buyer view of this supplier's public-sector wins.
| Title | Type | Value | Published |
|---|---|---|---|
| PURCH2700 Provision of Contract Agreement for the purchase order a Semiconductor & General-Purpose Plasma Etching Tool | contract | — | 26 Feb 2026 |
| Service contract for OIPT Plasma Tools | contract | — | 23 Feb 2026 |
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| PURCH2233 PROVISION OF PLASMA DIELECTRIC ETCH TOOL | contract | — | 11 Jan 2024 |
| 202122/547 Supply of up to four dry etch and deposition systems | contract | £2.2m | 24 Aug 2023 |
| GB-Egham: RHUL-23066 Procurement of 3no Power Supplier Units for Superconducting Magnets | contract | £18k | 17 Feb 2023 |
| Direct award for the Provision of Service Contract for the JWNC Oxford Instrument 6 Tools/Chambers | contract | — | 22 Dec 2022 |
| PURCH2014 Provision Of Plasma Enhanced Chemical Vapour Deposition (PECVD) Tool | contract | — | 25 May 2022 |