202122/547 Supply of up to four dry etch and deposition systems
Estimated value
£2.2m
Awarded value
£2.2m
Awarded 25 May 2023
Suppliers
1
Lots
1
1 awarded
Published
24 Aug 2023
Deadline 25 May 2023
Description
NOTICE OF AWARD OF four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher (D-RIE) •An Inductively Coupled Plasma-RIE (ICP-RIE) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)
Scope
- Reference
- BIP804651228
- Total value
- £2,155,581 excluding VAT
- Commercial tool
- Standalone contract
- Contract dates
- 10 Dec 2023 to 10 Dec 2026
- CPV classifications
- 22520000
Submission & procedure
- Submission deadline
- 25 May 2023, 11:00 pm
Award details
Awarded supplier(s), contract period and value as published in the award notice.
Awarded value
£2.2m
Award date
25 May 2023
Contract start
10 Dec 2023
Contract end
10 Dec 2026
Awarded to
Awarded suppliers· 1 supplier
Awarded 25 May 2023 · Contract period 10 Dec 2023 — 10 Dec 2026
Award value
£2.2m
Other contracts from University of Leeds
Full notice and award history for this contracting authority is on the buyer profile.
Other contracts awarded to Oxford Instruments· 10
Cross-buyer view of this supplier's public-sector wins.
| Title | Type | Value | Published |
|---|---|---|---|
| PURCH2700 Provision of Contract Agreement for the purchase order a Semiconductor & General-Purpose Plasma Etching Tool | contract | — | 26 Feb 2026 |
| Service contract for OIPT Plasma Tools | contract | — | 23 Feb 2026 |
| PURCH2490 Provision of Dilution Refrigerator with Extremely Low Temperatures | contract | — | 30 Apr 2025 |
| UPG-CONT-ARC 3 controller upgrade | contract | — | 16 Jan 2025 |
| UPG-CONT-ARC 3 controller upgrade | contract | £46k | 16 Jan 2025 |
| PURCH2233 PROVISION OF PLASMA DIELECTRIC ETCH TOOL | contract | — | 11 Jan 2024 |
| 202122/547 Supply of up to four dry etch and deposition systems | contract | — | 24 Aug 2023 |
| GB-Egham: RHUL-23066 Procurement of 3no Power Supplier Units for Superconducting Magnets | contract | £18k | 17 Feb 2023 |
| Direct award for the Provision of Service Contract for the JWNC Oxford Instrument 6 Tools/Chambers | contract | — | 22 Dec 2022 |
| PURCH2014 Provision Of Plasma Enhanced Chemical Vapour Deposition (PECVD) Tool | contract | — | 25 May 2022 |